Fiber optic interferometers have a wide range of applications, including biological and chemical measurements. Nevertheless, in the case of a reflective interferometer setup, standard silver mirrors cannot be used in every measurement, due to their chemical activity. This work investigates the surface quality of a thin optical layer of silicon nitride (SiN), which can serve as an alternative material for silver mirrors. We present measurements carried out with a Fabry-Perot fiber-optic interferometer working in a reflective mode. Measurement results allow us to determine the surface quality of the investigated layer.
Authors
Additional information
- DOI
- Digital Object Identifier link open in new tab 10.4302/plp.v13i3.1096
- Category
- Publikacja w czasopiśmie
- Type
- artykuły w czasopismach
- Language
- angielski
- Publication year
- 2021