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Gdańsk University of Technology

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Surface quality control of a thin SiN layer by optical measurements

Fiber optic interferometers have a wide range of applications, including biological and chemical measurements. Nevertheless, in the case of a reflective interferometer setup, standard silver mirrors cannot be used in every measurement, due to their chemical activity. This work investigates the surface quality of a thin optical layer of silicon nitride (SiN), which can serve as an alternative material for silver mirrors. We present measurements carried out with a Fabry-Perot fiber-optic interferometer working in a reflective mode. Measurement results allow us to determine the surface quality of the investigated layer.

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