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Functionalization of Parylene During Its Chemical Vapor Deposition

Two possible mechanisms for the reaction of four halogenated (metha)acrylate-based molecules with Parylene [poly (paraxylylene)] during its chemical vapor deposition were proposed. The chemical reactivity of acrylate double bond with the paraxylylene biradical was calculated for all four (metha)acrylate-based molecules. These calculations allowed the evaluation of the energetically favorable mechanism and indeed a direct correlation was found between both predicted and experimental reactivities. Next, the reactivity of the (metha)acrylate-modified Parylene films was evaluated through their reaction with different amines. The obtained amidated Parylene filmswere characterized with X-ray photoelectron spectroscopy, Kaiser test for primary amines, and fluorescence microscopy.The strong reactivity of (metha)acrylate-modified Parylene filmstoward nucleophilic substitution emphasizes a general methodfor the functionalization of self-supported Parylene films grownon the reacting solutions using the novel solid on liquid deposi-tion process. This paves the way to the development of multi-functional materials in a one-step process resulting from the deposition Parylene over liquid patterns. 2011, Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 49: 2952­2958, 2011

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