The novel fiber-optic low coherence sensor with thin diamond films is demonstrated. The undoped and boron-doped diamond films were elaborated by the use of the microwave plasma enhanced chemical vapor deposition (μPE CVD) system. The optical signal from the Fabry–Pérot cavity made with the application of those thin films is sensitive to displacement. The sensor characterization was made in the range of 0–600 μm. The measurements were performed using two superluminescent diodes (SLD) with central wavelengths of 1290 mm and 1550 mm and the output signal was analyzed by the measurement of the modulation change of spectral pattern. Furthermore, very good coefficient of the determination R2 > 0.9565 and the visibility of optical measured signal equal to 95.6% were achieved.
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Informacje dodatkowe
- DOI
- Cyfrowy identyfikator dokumentu elektronicznego link otwiera się w nowej karcie 10.1016/j.diamond.2016.02.015
- Kategoria
- Publikacja w czasopiśmie
- Typ
- artykuł w czasopiśmie wyróżnionym w JCR
- Język
- angielski
- Rok wydania
- 2016