Optical fiber-based sensors are expected to become key components in the control of industrial processes,and the tuning and the enhancement of their sensing properties are crucial for the further developmentof this technology. Atomic Layer Deposition (ALD), a vapor phase technique allowing for the deposition ofconformal thin films, is particularly suited for the deposition of controllable thin films on challenging sub-strates. In this work, we report the tuning of fiber-optic microsphere sensors using an ALD process of zincoxide (ZnO) based on diethylzinc (DEZ) and H2O at 90◦C. Nanolayers of 50 and 100 nm were deposited onthe fiber-optic microspheres sensors, using 250 and 500 ALD cycles respectively. The fabricated sampleswere characterized using Scanning Electron Microscopy (SEM), and the spectral responses of the deviceswere investigated theoretically and experimentally, by measuring the refractive index of different oils.It has been found that the biocompatible ZnO functional nanocoatings of the fiber-optic microspheresensors allowed for a wider measurement range of refractive indexes, opening up new prospects forfiber-based sensing devices.
Autorzy
- Marzena Hirsch link otwiera się w nowej karcie ,
- dr inż. Paulina Listewnik link otwiera się w nowej karcie ,
- dr inż Przemysław Struk,
- Matthieu Weber,
- Mikhael Bechelany,
- prof. dr hab. inż. Małgorzata Szczerska link otwiera się w nowej karcie
Informacje dodatkowe
- DOI
- Cyfrowy identyfikator dokumentu elektronicznego link otwiera się w nowej karcie 10.1016/j.sna.2019.111594
- Kategoria
- Publikacja w czasopiśmie
- Typ
- artykuły w czasopismach
- Język
- angielski
- Rok wydania
- 2019
