Publications Repository - Gdańsk University of Technology

n this article, the concept of a prototype femtosecond laser micromachining system and a femtosecond solid-state Yb:KYW laser is presented. Ultrashort laser pulses have many advantages over the long pulses in laser micromachining, due to their unique ability to interact with different materials without transferring heat to them. This allows very precise and pure laser-processing, clean cuts and sharp edges. A femtosecond laser micromachining device presented in this article is equipped with high-precision galvo scanner, quality optical elements and automatic process supporting tools, resulting in the maximum use of the femtosecond laser potential for precise micromachining and MEMS fabrication.

Authors

• Katarzyna Garasz link open in new tab ,
• Marek Kocik,
• Robert Barbucha link open in new tab ,
• Mateusz Tański link open in new tab ,
• Jerzy Mizeraczyk,
• Michał Nejbauer,
• Czesław Radzewicz