In this paper we present results of preliminary research of using nitrogen-doped diamond (NDD) films as reflective layer in Fabry-Pérot interferometer. NDD films were deposited on Si substrates by Microwave Plasma Enhanced Chemical Vapor Deposition (MPECVD) with the use of CH4, H2 and N2 gas mixtures. During deposition process methane flow rate varied while nitrogen flow was constant. We performed series of measurements which showed that NDD can be used as a mirror in Fabry-Pérot interferometer. The best signal visibility and repeatability of measurements were obtained for sample made with 3 sccm methane flow rate.
Authors
Additional information
- DOI
- Digital Object Identifier link open in new tab 10.1117/12.2314445
- Category
- Aktywność konferencyjna
- Type
- materiały konferencyjne indeksowane w Web of Science
- Language
- angielski
- Publication year
- 2018
