Repozytorium publikacji - Politechnika Gdańska

In this paper we present results of preliminary research of using nitrogen-doped diamond (NDD) films as reflective layer in Fabry-Pérot interferometer. NDD films were deposited on Si substrates by Microwave Plasma Enhanced Chemical Vapor Deposition (MPECVD) with the use of CH4, H2 and N2 gas mixtures. During deposition process methane flow rate varied while nitrogen flow was constant. We performed series of measurements which showed that NDD can be used as a mirror in Fabry-Pérot interferometer. The best signal visibility and repeatability of measurements were obtained for sample made with 3 sccm methane flow rate.

Autorzy

• Monika Kosowska link otwiera się w nowej karcie ,
• dr inż. Daria Majchrowicz link otwiera się w nowej karcie ,
• Sankaran Kamatchi,
• dr inż. Mateusz Ficek link otwiera się w nowej karcie ,
• prof. dr hab. inż. Małgorzata Szczerska link otwiera się w nowej karcie ,
• Ken Haenen