Repozytorium publikacji - Politechnika Gdańska

This study presents a microsphere-based fiber-optic sensor with a ZnO Atomic Layer Deposition (ALD) coating thickness of 100 nm for temperature measurements. Metrological properties of the sensor were investigated over the temperature range of 100 °C to 300 °C, with a 10 °C step. An interferometric signal is used to control whether the microstructure is whole. Spectrum shift of a reflected signal is used to ascertain changes in the measured parameter. With changing temperature, the peak position of a reflected signal also changes. The R2 coefficient of the presented sensor indicates a good linear fit of over 0.99 to the obtained data. The sensitivity of the sensor investigated in this study equals 0.019 nm/°C.

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