This study presents a microsphere-based fiber-optic sensor with a ZnO Atomic Layer Deposition (ALD) coating thickness of 100 nm for temperature measurements. Metrological properties of the sensor were investigated over the temperature range of 100 °C to 300 °C, with a 10 °C step. An interferometric signal is used to control whether the microstructure is whole. Spectrum shift of a reflected signal is used to ascertain changes in the measured parameter. With changing temperature, the peak position of a reflected signal also changes. The R2 coefficient of the presented sensor indicates a good linear fit of over 0.99 to the obtained data. The sensitivity of the sensor investigated in this study equals 0.019 nm/°C.
Authors
Additional information
- DOI
- Digital Object Identifier link open in new tab 10.3390/engproc2020002099
- Category
- Publikacja w czasopiśmie
- Type
- artykuły w czasopismach
- Language
- angielski
- Publication year
- 2021
